Semiconductor Parts CNC Machining
Semiconductor equipment shops come to us when a chamber flange will not seal or a PEEK fixture warped in someone else's shop. CHX Metal machines 6061 chambers, 316L fittings and PEEK tooling with sealing faces at 0.01 mm flatness, plus or minus 0.005 mm general tolerances, MOQ from 1 piece, prototypes in 3 to 7 days.
What equipment builders outsource here
Chamber bodies and lids, adapter flanges, ESD-safe fixtures, wafer-handling prototype parts - the one-to-fifty piece work that equipment shops cannot schedule internally without blowing their own deadlines. A prototype tool usually means 3 to 10 parts; a production release means 50 to 200 per quarter. Both fit the same process here.
Materials and what they demand
6061-T6 with hard or type-II anodizing for chamber bodies - the anodizer's masking on sealing faces has to be specified before quoting, not discovered at assembly. 316L for wet-process fittings. PEEK and PTFE for insulation and low-outgassing fixtures, where we machine with sharp tools and slow feeds so the surface does not smear.
Sealing faces are the whole part
A flange with a perfect bore and a wavy face is scrap at vacuum test. Sealing faces get their own operation: single-pass finishing, face measured at eight points, and the direction of the tool marks noted on the report. Flatness on 100 to 200 mm faces typically lands at 0.01 mm; tighter is quoted after we see the drawing.
Cleanliness, packaging, and the trip to your floor
Parts are deburred, cleaned, dried and packed with VCI-free materials - plastic chips left inside a chamber become someone's pump failure. We ship EXW Shenzhen and are happy to recommend reliable freight forwarders; for equipment builds we can consolidate several part numbers into one shipment with one packing list.
Frequently asked questions
Can you hold flatness on large sealing faces?
0.01 mm flatness on faces up to about 300 mm is regular work; beyond that we review the drawing and confirm before quoting rather than promise blind.
Do you machine PEEK without delamination?
Yes - sharp positive-rake tooling, controlled depth per pass, and annealing between rough and finish when the geometry is asymmetric. Surface finish typically lands around Ra 0.8.
What batch sizes make sense for you?
From 1 piece for a prototype chamber to a few hundred for production fixtures. The per-part price changes, the documentation does not.
Can you match an existing chamber that has no drawing?
Send the old part. We measure it, produce a drawing for your approval, and machine against that - so the replacement is documented, not a one-off copy.
Send your drawing, get a price in 24 hours
Name, email and what you need. Attach a drawing if you have one — STEP, PDF, DXF or a photo of the print. We reply with unit price, MOQ and lead time, usually within one working day.
Prefer email? Send drawings to mc@chxmetal.com.